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Large Area Mask |
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MURA是指顯示器亮度不均勻造成的現象，但如果光罩本身已有MURA現象，則在TFT LCD上將造成嚴重的品質問題。因此避免在光罩上產生MURA是一個極為重要的技術問題。
在光罩製程中會產生MURA問題，主要是在圖形處理的製程及光罩描繪的製程。本公司除了以製程能力提昇來降低此一現象的產生外，在圖形處理製程也投入大量研究，從根本的圖形資料處理來避免光罩上MURA的產生。 |
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| Normal LCD Mask |
| Glass Size & Type |
Address Size |
CD Tolerance> |
CD Uniformity |
Defect Criteria |
Registration |
| 390x610x6T (U7550) |
0.1 ~ |
±0.2 |
0.2 |
1 |
±0.5 |
| 390x610x6T (U7650) |
0.1 ~ |
±0.2 |
0.2 |
1 |
±0.5 |
| 520X610X10T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
| 500x750x8T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
| 520x800x10T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
| 700x800x8T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
| 800x920x8T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
| 800x920x10T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
| 850x1200x10T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
| 850x1400x10T |
0.1 ~ |
±0.2 |
0.2 |
1 |
±0.5 |
| 1220x1400x13T |
0.1 ~ |
±0.25 |
0.2 |
1 |
±0.5 |
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| GTM Mask |
| Glass Size Type |
Address Size |
CD Tolerance |
CD Uniformity |
Defect Criteria |
Registration |
| 390x610x6T (U7550) |
0.1 ~ |
±0.1 |
0.1 |
1 |
±0.5 |
| 390x610x6T (U7650) |
0.1 ~ |
±0.1 |
0.1 |
1 |
±0.5 |
| 520x800x10T |
0.1 ~ |
±0.1 |
0.1 |
1 |
±0.5 |
| 800x920x10T |
0.1 ~ |
±0.1 |
0.1 |
1 |
±0.5 |
| 850x1200x10T |
0.1 ~ |
±0.1 |
0.1 |
1 |
±0.5 |
| 1220x1400x13T |
0.1 ~ |
±0.1 |
0.1 |
1 |
±0.5 |
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