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Defect Inspection

ü   Defect Type

defect1

ü   Die-to-Die Inspection

defect2

ü   Die-to-DataBase Inspection

defect3

ü   Defect Repair

 defect4

 

 

1. Repairing defects identified by the inspection tools.


2. Repair Equipment: Laser : DRS II 840-e、 Ion Beam : ACCURA 800


3. Repair method:
    -Milling : Instantaneous evaporation of defects using Laser
    -Deposition : Materials in the form of gas (Cr) are deposited and fixed at specific location on the pattern using Laser or Ion beam energy.