Defect Inspection

ü   Defect Type


ü   Die-to-Die Inspection


ü   Die-to-DataBase Inspection


ü   Defect Repair




1. Repairing defects identified by the inspection tools.

2. Repair Equipment: Laser : DRS II 840-e、 Ion Beam : ACCURA 800

3. Repair method:
    -Milling : Instantaneous evaporation of defects using Laser
    -Deposition : Materials in the form of gas (Cr) are deposited and fixed at specific location on the pattern using Laser or Ion beam energy.