Defect Inspection
ü Defect Type
ü Die-to-Die Inspection
ü Die-to-DataBase Inspection
ü Defect Repair
1. Repairing defects identified by the inspection tools.
2. Repair Equipment： Laser : DRS II 840-e、 Ion Beam : ACCURA 800
3. Repair method：
-Milling : Instantaneous evaporation of defects using Laser
-Deposition : Materials in the form of gas (Cr) are deposited and fixed at specific location on the pattern using Laser or Ion beam energy.